Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 7, 2019
Patent Application Number
15651399
Date Filed
July 17, 2017
Patent Citations Received
Patent Primary Examiner
Patent abstract
A reticle pod for accommodating a reticle is provided. The reticle pod comprises a base; a cover; and at least one supporting member. When the reticle is accommodated on the reticle pod, the supporting member abuts against the reticle through a protrusion part; wherein the maximum static friction is constantly greater than a horizontal force applied to the support module from the reticle.
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