Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 27, 2021
Patent Application Number
16314837
Date Filed
June 26, 2017
Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention relates to a container for storing a wafer, particularly to a container for storing a wafer in which a plurality of purging areas is vertically partitioned in the interior of a storage chamber, and a purge gas is sprayed into the plurality of purging areas, thereby allowing not only uniform purging of the wafer to be assured but also efficient purging of the wafer without waste of the purge gas to be achieved.
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