Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Bum Je Woo0
Date of Patent
June 7, 2022
0Patent Application Number
157753590
Date Filed
April 2, 2018
0Patent Citations Received
Patent Primary Examiner
The present invention relates to a wafer storage container capable of removing fumes on a wafer or removing moisture therefrom by supplying purge gas to the wafer stored in a storage chamber. More particularly, the present invention relates to a wafer storage container capable of quickly blocking an injection hole and an exhaust hole and of preventing contaminants from flowing into a storage chamber upon the blocking of the exhaust hole.
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