Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mao-Nan Chang0
Date of Patent
December 13, 2005
0Patent Application Number
108613850
Date Filed
June 7, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An electrical scanning probe microscope (SPM) apparatus. The SPM apparatus is equipped with an atomic force microscope with long-wavelength laser source to acquire topographic images and an electrical scanning sensor operatively coupled to the atomic force microscope to acquire synchronous two-dimensional electrical images. The photoperturbation effects induced by stray light and perturbation of the contrast of SCM images can be ameliorated.
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