Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Rempei Nakata0
Hideshi Miyajima0
Keiji Fujita0
Date of Patent
August 22, 2006
0Patent Application Number
107014760
Date Filed
November 6, 2003
0Patent Primary Examiner
Patent abstract
Disclosed is a semiconductor device comprising a semiconductor substrate, a porous insulating film formed above the semiconductor substrate, the porous insulating film having a relative dielectric constant of 2.5 or less and including a first insulating material, at least a portion of pores in the porous insulating film having on the inner wall thereof a layer of a second insulating material which differs in nature from the first insulating material, and a plug and/or a wiring layer buried in the porous insulating film.
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