Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
John M. Nugent0
Shafqat Ahmed0
Ed Nabighian0
George J. Korsh0
Nicole Meier Chang0
Date of Patent
June 28, 2011
Patent Application Number
12727010
Date Filed
March 18, 2010
Patent Citations Received
Patent Primary Examiner
Patent abstract
An embodiment of the present invention is a technique to prevent reliability failures in semiconductor devices. A trench is patterned in a polyimide layer over a guard ring having a top metal layer. A passivation layer is etched at bottom of the trench. A capping layer is deposited on the trench over the etched passivation layer. The capping layer and the top metal layer form a mechanical strong interface to prevent a crack propagation.
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