Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chien-Hua Chen0
Henry Kang0
John Bamber0
Date of Patent
July 10, 2012
Patent Application Number
11192945
Date Filed
July 29, 2005
Patent Citations Received
Patent Primary Examiner
Patent abstract
A micro electro-mechanical system (MEMS) device includes an electrical wafer, a mechanical wafer, a plasma treated oxide seal bonding the electrical wafer to the mechanical wafer, and an electrical interconnect between the electrical wafer and the mechanical wafer.
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