Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Dennis Grimard0
Hizam Sahibudeen0
Terry Bluck0
Date of Patent
January 29, 2013
Patent Application Number
12372664
Date Filed
February 17, 2009
Patent Citations Received
Patent Primary Examiner
Patent abstract
Systems and methods for optimally dechucking a wafer from an electrostatic chuck are described. The force on a lift-pin mechanism is monitored and a dechuck voltage is determined based on the force. The wafer is dechucked at the determined dechuck voltage.
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