US Patent 8783463 Wafer container with tubular environmental control components

Patent 8783463 was granted and assigned to Entegris on July, 2014 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Entegris

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

87834630

Patent Inventor Names

Matthew A. Fuller0

James A. Watson0

John Burns0

Mark V. Smith0

Martin L. Forbes0

Date of Patent

July 22, 2014

Patent Application Number

129224080

Date Filed

March 13, 2009

Patent Citations Received

‌

US Patent 11948821 Substrate storing container

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US Patent 11869787 Substrate container valve assemblies

Patent Primary Examiner

‌

Jacob K. Ackun Jr.

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