List of KLA-Tencor patents

Patents where

Current Assignee

Name

KLA-Tencor

Name	Description	Patent Applicant	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 11313809 Process control metrology		KLA-Tencor	KLA-Tencor	United States Patent and Trademark Office	11313809	April 26, 2022
‌ US Patent 11519719 Transmission small-angle X-ray scattering metrology system	Patent 11519719 was granted and assigned to KLA-Tencor on December, 2022 by the United States Patent and Trademark Office.		KLA-Tencor	United States Patent and Trademark Office	11519719	December 6, 2022
‌ US Patent 10352695 X-ray scatterometry metrology for high aspect ratio structures	Patent 10352695 was granted and assigned to KLA-Tencor on July, 2019 by the United States Patent and Trademark Office.	KLA-Tencor	KLA-Tencor	United States Patent and Trademark Office	10352695	July 16, 2019
‌ US Patent 6948141 Apparatus and methods for determining critical area of semiconductor design data	Patent 6948141 was granted and assigned to KLA-Tencor on September, 2005 by the United States Patent and Trademark Office.		KLA-Tencor	United States Patent and Trademark Office	6948141	September 20, 2005
‌ US Patent 7826071 Parametric profiling using optical spectroscopic systems	Patent 7826071 was granted and assigned to KLA-Tencor on November, 2010 by the United States Patent and Trademark Office.		KLA-Tencor	United States Patent and Trademark Office	7826071	November 2, 2010
‌ US Patent 7067335 Apparatus and methods for semiconductor IC failure detection	Patent 7067335 was granted and assigned to KLA-Tencor on June, 2006 by the United States Patent and Trademark Office.		KLA-Tencor	United States Patent and Trademark Office	7067335	June 27, 2006
‌ US Patent 9874526 Methods and apparatus for polarized wafer inspection	Patent 9874526 was granted and assigned to KLA-Tencor on January, 2018 by the United States Patent and Trademark Office.	KLA-Tencor	KLA-Tencor	United States Patent and Trademark Office	9874526	January 23, 2018
‌ US Patent 7009704 Overlay error detection	Patent 7009704 was granted and assigned to KLA-Tencor on March, 2006 by the United States Patent and Trademark Office.		KLA-Tencor	United States Patent and Trademark Office	7009704	March 7, 2006
‌ US Patent 7478019 Multiple tool and structure analysis	Patent 7478019 was granted and assigned to KLA-Tencor on January, 2009 by the United States Patent and Trademark Office.		KLA-Tencor	United States Patent and Trademark Office	7478019	January 13, 2009
‌ US Patent 11353493 Data-driven misregistration parameter configuration and measurement system and method	Patent 11353493 was granted and assigned to KLA-Tencor on June, 2022 by the United States Patent and Trademark Office.	KLA-Tencor	KLA-Tencor	United States Patent and Trademark Office	11353493	June 7, 2022
‌ US Patent 8664594 Electron-optical system for high-speed and high-sensitivity inspections	Patent 8664594 was granted and assigned to KLA-Tencor on March, 2014 by the United States Patent and Trademark Office.		KLA-Tencor	United States Patent and Trademark Office	8664594	March 4, 2014
‌ US Patent 11257207 Inspection of reticles using machine learning	Patent 11257207 was granted and assigned to KLA-Tencor on February, 2022 by the United States Patent and Trademark Office.	KLA-Tencor	KLA-Tencor	United States Patent and Trademark Office	11257207	February 22, 2022
‌ US Patent 10451412 Apparatus and methods for detecting overlay errors using scatterometry	Patent 10451412 was granted and assigned to KLA-Tencor on October, 2019 by the United States Patent and Trademark Office.	KLA-Tencor	KLA-Tencor	United States Patent and Trademark Office	10451412	October 22, 2019
‌ US Patent 10101670 Statistical model-based metrology	Patent 10101670 was granted and assigned to KLA-Tencor on October, 2018 by the United States Patent and Trademark Office.	KLA-Tencor	KLA-Tencor	United States Patent and Trademark Office	10101670	October 16, 2018
‌ US Patent 7175945 Focus masking structures, focus patterns and measurements thereof	Patent 7175945 was granted and assigned to KLA-Tencor on February, 2007 by the United States Patent and Trademark Office.		KLA-Tencor	United States Patent and Trademark Office	7175945	February 13, 2007
‌ US Patent 7006596 Light element measurement	Patent 7006596 was granted and assigned to KLA-Tencor on February, 2006 by the United States Patent and Trademark Office.		KLA-Tencor	United States Patent and Trademark Office	7006596	February 28, 2006
‌ US Patent 11333621 Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction	Patent 11333621 was granted and assigned to KLA-Tencor on May, 2022 by the United States Patent and Trademark Office.	KLA-Tencor	KLA-Tencor	United States Patent and Trademark Office	11333621	May 17, 2022
‌ US Patent 10324050 Measurement system optimization for X-ray based metrology	Patent 10324050 was granted and assigned to KLA-Tencor on June, 2019 by the United States Patent and Trademark Office.	KLA-Tencor	KLA-Tencor	United States Patent and Trademark Office	10324050	June 18, 2019
‌ US Patent 9645097 In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning	Patent 9645097 was granted and assigned to KLA-Tencor on May, 2017 by the United States Patent and Trademark Office.	KLA-Tencor	KLA-Tencor	United States Patent and Trademark Office	9645097	May 9, 2017
‌ US Patent 10395362 Contour based defect detection	Patent 10395362 was granted and assigned to KLA-Tencor on August, 2019 by the United States Patent and Trademark Office.	KLA-Tencor	KLA-Tencor	United States Patent and Trademark Office	10395362	August 27, 2019
‌ US Patent 10462391 Dark-field inspection using a low-noise sensor	Patent 10462391 was granted and assigned to KLA-Tencor on October, 2019 by the United States Patent and Trademark Office.	KLA-Tencor	KLA-Tencor	United States Patent and Trademark Office	10462391	October 29, 2019
‌ US Patent 10013518 Model building and analysis engine for combined X-ray and optical metrology	Patent 10013518 was granted and assigned to KLA-Tencor on July, 2018 by the United States Patent and Trademark Office.	KLA-Tencor	KLA-Tencor	United States Patent and Trademark Office	10013518	July 3, 2018
‌ US Patent 10345721 Measurement library optimization in semiconductor metrology	Patent 10345721 was granted and assigned to KLA-Tencor on July, 2019 by the United States Patent and Trademark Office.	KLA-Tencor	KLA-Tencor	United States Patent and Trademark Office	10345721	July 9, 2019
‌ US Patent 9291554 Method of electromagnetic modeling of finite structures and finite illumination for metrology and inspection	Patent 9291554 was granted and assigned to KLA-Tencor on March, 2016 by the United States Patent and Trademark Office.		KLA-Tencor	United States Patent and Trademark Office	9291554	March 22, 2016
‌ US Patent 10395358 High sensitivity repeater defect detection	Patent 10395358 was granted and assigned to KLA-Tencor on August, 2019 by the United States Patent and Trademark Office.	KLA-Tencor	KLA-Tencor	United States Patent and Trademark Office	10395358	August 27, 2019

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