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C23C 14/22

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

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C23C 14/56
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C23C 14/221
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C23C 14/223
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C23C 14/228
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C23C 14/24
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C23C 14/34
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C23C 14/48
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C23C 14/50
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C23C 14/52
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C23C 14/54
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 C23C 14/22

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

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Is a
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Patent classification
Classification Type
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Cooperative Patent Classification
Parent classification
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C23C 14/00
Website
http://data.epo.org/linked-data/def/cpc/C23C14-22

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