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G01N 23/2251
Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups [CPC: G01N3/00] – [CPC: G01N17/00], [CPC: G01N21/00] or [CPC: G01N22/00] by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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