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H01J 37/321

{Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma}

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Edits on 16 Mar, 2022

"update inverses"

edited on 16 Mar, 2022

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Edits on 5 Mar, 2022

"update inverses"

edited on 5 Mar, 2022

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created this topic on 5 Mar, 2022

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H01J 37/321

{Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma}

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http://data.epo.org/linked-data/def/cpc/H01J37-321

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