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H01L 21/0206

{Cleaning during device manufacture during, before or after processing of insulating layers}

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Edits on 16 Mar, 2022

"update inverses"

edited on 16 Mar, 2022

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"update inverses"

edited on 16 Mar, 2022

Edits made to:

Infobox (+1 properties)

Infobox

Child classification

Edits on 5 Mar, 2022

"Created via: Entity Importer"

created this topic on 5 Mar, 2022

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Description (+92 characters)

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H01L 21/0206

{Cleaning during device manufacture during, before or after processing of insulating layers}

Infobox

Is a

Patent classification

Classification Type

Cooperative Patent Classification

Parent classification

Website

http://data.epo.org/linked-data/def/cpc/H01L21-0206

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