H01L 21/02694
{Controlling the interface between substrate and epitaxial layer, e.g. by ion implantation followed by annealing}
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Edits on 16 Mar, 2022
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Edits on 5 Mar, 2022
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H01L 21/02694
{Controlling the interface between substrate and epitaxial layer, e.g. by ion implantation followed by annealing}
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