Other attributes
Child Classification
Classification Type
Parent Classification
No article content yet.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
H01L 21/20
Deposition of semiconductor materials on a substrate, e.g. epitaxial growth {solid phase epitaxy}
Find more entities like H01L 21/20
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
