H01L 21/67721

Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components {; Apparatus not specifically provided for elsewhere } for conveying, e.g. between different workstations {between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames }