H01L 21/68728

Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components {; Apparatus not specifically provided for elsewhere } for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches {the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers}