H01L 2224/80132
Active alignment, i.e. by apparatus steering, e.g. optical alignment using marks or sensors using marks formed outside the semiconductor or solid-state body, i.e. "off-chip"
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Edits on 16 Mar, 2022
Golden AI
Edits on 5 Mar, 2022
Golden AI
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Infobox (+3 properties)
Description (+173 characters)
H01L 2224/80132
Active alignment, i.e. by apparatus steering, e.g. optical alignment using marks or sensors using marks formed outside the semiconductor or solid-state body, i.e. "off-chip"
Infobox
Classification Type
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