Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof {the active layers comprising only AIIIBV compounds, e.g. GaAs, InP comprising a growth substrate not being an AIIIBV compound}
Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof {the active layers comprising only AIIIBV compounds, e.g. GaAs, InP comprising a growth substrate not being an AIIIBV compound}