H01S 5/2086
{Methods of obtaining the confinement using special etching techniques lateral etch control, e.g. mask induced}
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Edits on 16 Mar, 2022
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Edits on 5 Mar, 2022
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H01S 5/2086
{Methods of obtaining the confinement using special etching techniques lateral etch control, e.g. mask induced}
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