SBIR/STTR Award attributes
The goal of this project entitled Assembling the PDK for a PZT piezoMEMS Process is for Radiant to verify its PZT pMEMS process and complete the associated Process Design Kit (PDK) in order to support DoD prototyping and low volume production of piezoelectric MEMS components. In Phase 1, Radiant verified a photolithographic mask set holding a plethora of piezoMEMS device architectures and constructed an initial PDK with the aid of University of New Mexico and the University of California Los Angeles. In Phase II, Radiant will fabricate multiple wafers in six lots to characterize the resulting pMEMS devices then verify the yield, uniformity, and performance of those devices. The University of New Mexico (UNM) and the University of California Los Angeles (UCLA) will again team with Radiant. UNM will complete its analysis of the material properties, layer structure, and PZT compositions of Radiant’ I-Beam process to fully inform the PDK. UCLA will explore magnetic films deposited on Radiant’s pMEMS, opening the possibility for Radiant to become the world’s first Multiferroic MEMS foundry. At the end of Phase 2, Radiant Technologies will be prepared to begin foundry operations of PZT pMEMS in the United States.
