Patent attributes
According to one embodiment, an insulating layer is provided above a word line contact region portion. An upper surface of the insulating layer is at a height higher than an uppermost conductive layer. A first cover film is provided between the word line contact region portion and the insulating layer. A second cover film included in a first separation portion covers a side surface along a first direction of the insulating layer and a side surface along the first direction of the word line contact region portion. A third cover film is provided on the uppermost conductive layer. The third cover film covers a side surface along a second direction of the insulating layer. The first, second, and third cover films are of materials different from a material of the insulating layer.
