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US Patent 10002962 Vertical FET structure
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Date Filed
April 27, 2016
Date of Patent
June 19, 2018
Patent Application Number
15139937
Patent Citations Received
US Patent 11949011 Vertical transistor with gate encapsulation layers
0
US Patent 11075280 Self-aligned gate and junction for VTFET
US Patent 11282752 Method of forming vertical field-effect transistor devices having gate liner
US Patent 11309405 Vertical field effect transistor device having protruded shallow trench isolation and method for manufacturing the same
US Patent 11515217 Complementary metal oxide semiconductor device having fin field effect transistors with a common metal gate
US Patent 10453939 Reduced capacitance in vertical transistors by preventing excessive overlap between the gate and the source/drain
US Patent 10971407 Method of forming a complementary metal oxide semiconductor device having fin field effect transistors with a common metal gate
US Patent 11024738 Measurement of top contact resistance in vertical field-effect transistor devices
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
10002962
Patent Primary Examiner
Christine Enad
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