Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
William N Carr0
Date of Patent
June 26, 2018
0Patent Application Number
158056980
Date Filed
November 7, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An impedance spectrometer comprised of a thermal micro-platform supported with phononic structured nanowires disposed within a micromachined structure is provided to identify, monitor and characterize a gas, vapor, solid or liquid analyte. The impedance sensor and analyte sensing element in embodiments are formed from a semiconductor SOI starting wafer.
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