Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 10008402 Vertical wafer boat

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
February 14, 2018
Date of Patent
June 26, 2018
Patent Application Number
15897006
Patent Citations Received
‌
US Patent 11929272 Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device
0
‌
US Patent 11367641 Wafer storage device, carrier plate and wafer cassette
‌
US Patent 12027397 Enclosure system shelf including alignment features
0
‌
US Patent D924823 Adiabatic plate for substrate processing apparatus
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10008402
Patent Primary Examiner
‌
Patrick D Hawn

Find more entities like US Patent 10008402 Vertical wafer boat

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo