Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Thomas H. Lee0
Date of Patent
June 26, 2018
0Patent Application Number
153683960
Date Filed
December 2, 2016
0Patent Citations Received
Patent Primary Examiner
Patent abstract
There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.
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