US Patent 10008538 Semiconductor structure and method of forming the same

The present disclosure provides a semiconductor structure, including a logic region and a memory region adjacent to the logic region. The memory region includes a Nth metal layer, a bottom electrode over the Nth metal layer, a magnetic tunneling junction (MTJ) layer over the bottom electrode, a top electrode over the MTJ layer, and a (N+1)th metal layer over the top electrode. The top electrode includes material having an oxidation rate lower than that of Tantalum or Tantalum derivatives. N is an integer greater than or equal to 1.