US Patent 10018560 System and method for hyperspectral imaging metrology
Patent 10018560 was granted and assigned to KLA-Tencor on July, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 10, 2016
0
Date of Patent
July 10, 2018
0
Patent Applicant
Patent Application Number
15233648
0
Patent Citations Received
Patent Inventor Names
Andrew V. Hill
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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