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US Patent 10020220 Wafer positioning pedestal for semiconductor processing

Patent 10020220 was granted and assigned to Lam Research on July, 2018 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Current Assignee
Lam Research
Lam Research
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Date Filed
December 15, 2017
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Date of Patent
July 10, 2018
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Patent Applicant
Lam Research
Lam Research
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Patent Application Number
15843438
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Patent Citations Received
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US Patent 11955366 Pad raising mechanism in wafer positioning pedestal for semiconductor processing
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US Patent 10573549 Pad raising mechanism in wafer positioning pedestal for semiconductor processing
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US Patent 10636624 Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal
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US Patent 10903050 Endpoint sensor based control including adjustment of an edge ring parameter for each substrate processed to maintain etch rate uniformity
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US Patent 11651990 Substrate processing apparatus and driving method thereof
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US Patent 11387136 Pad raising mechanism in wafer positioning pedestal for semiconductor processing
Patent Inventor Names
Easwar Srinivasan
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Karl F. Leeser
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Paul Konkola
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
10020220
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Patent Primary Examiner
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Savitr Mulpuri
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