Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Erica Ann Douglas0
Matt Eichenfield0
Michael David Henry0
Ryan Camacho0
James Kenneth Douglas0
Adam Jones0
Date of Patent
July 24, 2018
0Patent Application Number
153789000
Date Filed
December 14, 2016
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
An optomechanical force sensor includes a substrate, a cantilevered beam anchored to the substrate, and a probe tip positioned near an end of the cantilevered beam distal to the substrate. A suspended waveguide is disposed on the cantilevered beam and is optically continuous with an input/output waveguiding structure. An optical cavity is defined within the suspended waveguide.
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