Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shintaro Yamada0
James Cameron0
Mingqi Li0
Owendi Ongayi0
Charlotte Cutler0
Date of Patent
July 24, 2018
Patent Application Number
15234124
Date Filed
August 11, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
Wet-strippable antireflective compositions comprising one or more silicon-containing polymers that are free of Q-monomers and hydridosilanes as polymerized units are provided. These compositions are useful in the manufacture of various electronic devices.
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