Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Junya Maruyama0
Shunpei Yamazaki0
Toru Takayama0
Yumiko Ohno0
Date of Patent
July 31, 2018
0Patent Application Number
153970450
Date Filed
January 3, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A substrate and a delamination film are separated by a physical means, or a mechanical means in a state where a metal film formed over a substrate, and a delamination layer comprising an oxide film including the metal and a film comprising silicon, which is formed over the metal film, are provided. Specifically, a TFT obtained by forming an oxide layer including the metal over a metal film; crystallizing the oxide layer by heat treatment; and performing delamination in a layer of the oxide layer or at both of the interface of the oxide layer is formed.
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