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US Patent 10038137 MRAM device and method for fabricating the same

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Is a
Patent
Patent
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Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
100381370
Patent Inventor Names
Sheng-Haung Huang0
Harry-Hak-Lay Chuang0
Hung-Cho Wang0
Kuei-Hung Shen0
Shy-Jay Lin0
Date of Patent
July 31, 2018
0
Patent Application Number
152814280
Date Filed
September 30, 2016
0
Patent Citations Received
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US Patent 11839090 Memory cells separated by a void-free dielectric structure
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US Patent 10891997 Memory array with horizontal source line and a virtual source line
0
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US Patent 10930332 Memory array with individually trimmable sense amplifiers
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US Patent 10971680 Multi terminal device stack formation methods
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US Patent 11004685 Multi-layer structures and methods of forming
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US Patent 11005032 Techniques for MRAM MTJ top electrode to metal layer interface including spacer
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US Patent 11037989 Method to form memory cells separated by a void-free dielectric structure
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US Patent 11037990 Method to form memory cells separated by a void-free dielectric structure
...
Patent Primary Examiner
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Caridad Everhart
0
Patent abstract

A semiconductor device structure is provided. The semiconductor device structure includes a magnetoresistive random access memory (MRAM) device in an insulating layer. The MRAM device includes a first electrode, a magnetic tunnel junction (MTJ) over the first electrode, a second electrode over the MTJ, and an insulating spacer surrounding sidewalls of the first electrode, the MTJ, and the second electrode. Top surfaces of the insulating spacer and the second electrode are exposed from the insulating layer. The semiconductor device structure also includes a conductive pad over the insulating layer and electrically connected to the second electrode. The MTJ is entirely covered by the conductive pad.

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