Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jui Tang Chang0
Date of Patent
August 7, 2018
0Patent Application Number
154559550
Date Filed
March 10, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Apparatus for carrying and shielding wafers includes a wafer container, a plurality of wafer cassettes disposed in the wafer container, and an engaging lock that prevents the wafer cassettes from shifting, the engaging lock being in direct contact with walls of the wafer cassettes.
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