Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takayuki Teshima0
Arisa Oka0
Date of Patent
August 14, 2018
Patent Application Number
14804784
Date Filed
July 21, 2015
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A structure includes a silicon substrate having a plurality of recessed portions, each recessed portion having a bottom and a side wall, silicide layers, each silicide layer in contact with the bottoms of the plurality of recessed portions, and a metal structure including metal portions, each metal portion disposed in the plurality of recessed portions and in contact with the silicide layers. The silicide layers are electrically connected to each other through the silicon substrate.
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