Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Andrew V. Hill0
Amnon Manassen0
Yuval Lubashevsky0
Yuri Paskover0
Date of Patent
August 14, 2018
Patent Application Number
15222503
Date Filed
July 28, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
Metrology methods and systems are provided, in which the detected image is split at a field plane of the collection path of the metrology system's optical system into at least two pupil plane images. Optical elements such as prisms may be used to split the field plane images, and multiple targets or target cells may be measured simultaneously by spatially splitting the field plane and/or the illumination sources and/or by using two polarization types. The simultaneous capturing of multiple targets or target cells increases the throughput of the disclosed metrology systems.
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