US Patent 10049891 Selective in situ cobalt residue removal
Patent 10049891 was granted and assigned to Applied Materials on August, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 31, 2017
0
Date of Patent
August 14, 2018
0
Patent Applicant
Patent Application Number
15609372
0
Patent Citations Received
•••
Patent Inventor Names
Xikun Wang
0
Nitin Ingle
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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