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US Patent 10049920 Reduced tip-to-tip and via pitch at line end
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Patent
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Date Filed
November 14, 2017
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Date of Patent
August 14, 2018
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Patent Application Number
15812119
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Patent Citations Received
US Patent 11894265 Top via with damascene line and via
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US Patent 12080640 Self-aligned via to metal line for interconnect
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Patent Inventor Names
Brent A. Anderson
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Benjamin D. Briggs
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Theodorus E. Standaert
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10049920
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Patent Primary Examiner
Peniel M Gumedzoe
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