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US Patent 10056469 Gate cut integration and related device
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Patent
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Date Filed
February 13, 2017
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Date of Patent
August 21, 2018
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Patent Application Number
15430647
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Patent Citations Received
US Patent 11574811 Tight pitch patterning
US Patent 11854903 Footing removal in cut-metal process
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US Patent 10177037 Methods of forming a CT pillar between gate structures in a semiconductor
US Patent 10396206 Gate cut method
Patent Inventor Names
Laertis Economikos
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Hui-feng Li
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10056469
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Patent Primary Examiner
Selim Ahmed
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