Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 28, 2018
Patent Application Number
15209185
Date Filed
July 13, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
Suspending a microelectromechanical system (MEMS) pressure sensing element inside a cavity using spring-like corrugations or serpentine crenellations, reduces thermally-mismatched mechanical stress on the sensing element. Overlaying the spring-like structures and the sensing element with a gel further reduces thermally-mismatched stress and vibrational dynamic stress.
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