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US Patent 10062590 Front opening ring pod

Patent 10062590 was granted and assigned to Lam Research on August, 2018 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Current Assignee
Lam Research
Lam Research
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Date Filed
August 14, 2017
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Date of Patent
August 28, 2018
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Patent Applicant
Lam Research
Lam Research
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Patent Application Number
15676687
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Patent Citations Received
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US Patent 12076863 Autoteach system
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US Patent D980176 Substrate processing system carrier
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US Patent 11626305 Sensor-based correction of robot-held object
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US Patent 11279032 Apparatus, systems, and methods for improved joint coordinate teaching accuracy of robots
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US Patent 11348767 Plasma processing apparatus having a focus ring adjustment assembly
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US Patent D954769 Enclosure system shelf
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US Patent 11370114 Autoteach enclosure system
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US Patent 11842917 Process kit ring adaptor
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US Patent 11955356 Processing system and transfer method
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US Patent 12027397 Enclosure system shelf including alignment features
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•••
Patent Inventor Names
Scott Wong
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Derek John Witkowicki
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Marc Estoque
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Richard H. Gould
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Alex Paterson
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Austin Ngo
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Damon Tyrone Genetti
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
10062590
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Patent Primary Examiner
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Bryon Gehman
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