Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Anthony K. Stamper0
Vincent J. McGahay0
Zhong-Xiang He0
Date of Patent
August 28, 2018
0Patent Application Number
154432760
Date Filed
February 27, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The present disclosure relates to semiconductor structures and, more particularly, to segmented guard-ring and chip edge seals and methods of manufacture. The structure includes: a guard ring structure formed in a low-k dielectric material; and an edge seal structure formed through the low-k dielectric material to at least a substrate underneath the low-k dielectric material.
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