Patent attributes
An object is to continuously apply voltage to a MEMS device using first to fifth or sixth transistors. One of a source and a drain of the first transistor is electrically connected to one of a source and a drain of the second transistor. One of a source and a drain of the third transistor is electrically connected to one of a source and a drain of the fourth transistor. A gate of the first transistor is electrically connected to one of a source and a drain of the fifth transistor. A gate of the second transistor is electrically connected to the one of the source and the drain of the third transistor. A gate of the fourth transistor is electrically connected to the gate of the first transistor. The MEMS device is electrically connected to the one of the source and the drain of the first transistor.