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US Patent 10083847 Ceiling transport vehicle
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Patent
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Date Filed
October 6, 2014
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Date of Patent
September 25, 2018
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Patent Application Number
15028037
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Patent Citations Received
US Patent 11862494 Crane monitoring system and method
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US Patent 10940878 Article transport facility
US Patent 11270900 Apparatus and method for handling wafer carrier doors
US Patent 11784073 Apparatus and method for handling wafer carrier doors
US Patent 11791217 Gate structure and method with dielectric gates and gate-cut features
US Patent 10186442 Carrier buffering device and storage method
US Patent 10272931 Travel obstructing device
US Patent 10622236 Apparatus and method for handling wafer carrier doors
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Patent Inventor Names
Daichi Tomida
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10083847
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Patent Primary Examiner
Glenn F Myers
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