US Patent 10087521 Silicon-nitride-containing thermal chemical vapor deposition coating
Patent 10087521 was granted and assigned to Silcotek Corporation on October, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 15, 2015
0
Date of Patent
October 2, 2018
0
Patent Applicant
Patent Application Number
14970015
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Patent Citations Received
Patent Inventor Names
Min Yuan
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David A. Smith
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James B. Mattzela
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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