Patent 10094685 was granted and assigned to Mitutoyo on October, 2018 by the United States Patent and Trademark Office.
A detection head movable relative to a scale detects diffracted light and outputs a detection result. The diffracted light is diffracted by an incremental pattern. A signal processing unit calculates a relative displacement between the scale and the detection head. The detection head includes: a light source emitting the light to the scale; and a detection unit including a light-receiving unit in which a plurality of light-receiving elements that output a detection signal are arranged. The number of the plurality of light-receiving elements is an even number. A period of the arrangement of the plurality of light-receiving elements is an odd-number multiple of a fundamental period. The fundamental period is a period of interference fringes formed on the light-receiving unit by +1st and −1st order diffracted lights. A width of the light-receiving element is not equal to an integral multiple of the fundamental period.