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US Patent 10103046 Buffer chamber wafer heating mechanism and supporting robot

Patent 10103046 was granted and assigned to Applied Materials on October, 2018 by the United States Patent and Trademark Office.

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Patent abstract

Buffer chamber including robots, a carousel and at least one heating module for use with a batch processing chamber are described. Robot configurations for rapid and repeatable movement of wafers into and out of the buffer chamber and cluster tools incorporating the buffer chambers and robots are described.

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