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US Patent 10104718 Temperature detection and control system for layered heaters

Patent 10104718 was granted and assigned to Watlow on October, 2018 by the United States Patent and Trademark Office.

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Contents

Is a
Patent
Patent

Patent attributes

Patent Applicant
Watlow
Watlow
Current Assignee
Watlow
Watlow
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10104718
Date of Patent
October 16, 2018
Patent Application Number
14729179
Date Filed
June 3, 2015
Patent Citations Received
‌
US Patent 12085609 Thermal control wafer with integrated heating-sensing elements
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US Patent 12000885 Multiplexed thermal control wafer and coldplate
0
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US Patent 12013432 Thermal control wafer with integrated heating-sensing elements
0
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US Patent 12061227 Integrated heater and temperature measurement
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Patent Primary Examiner
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Shawntina Fuqua
Patent abstract

A system for detecting and controlling temperature of a layered heater is provided that includes a layered heater having in one form a substrate, a first dielectric layer disposed on the substrate, a sensor layer disposed on the first dielectric layer, a second dielectric layer disposed on the sensor layer, a resistive heating layer disposed on the second dielectric layer, and a third dielectric layer disposed on the resistive heating layer. An overtemperature detection circuit is provided in one form that is operatively connected to the resistive heating layer. The circuit includes a resistor, the sensor layer, and an electromechanical relay in parallel with the sensor layer. The sensor layer defines a material having a relatively high TCR and the resistive heating layer defines a material having a relatively low TCR such that a response time of the control system is relatively fast.

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