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US Patent 10126321 Micro-opto-electromechanical systems (MOEMS) device
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Date Filed
January 28, 2016
Date of Patent
November 13, 2018
Patent Application Number
15008559
Patent Citations Received
US Patent 11408912 Feedthrough rejection for optomechanical devices
US Patent 10705112 Noise rejection for optomechanical devices
US Patent 10956768 Feedback cooling and detection for optomechanical devices
US Patent 11372019 Optomechanical resonator stabilization for optomechanical devices
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US Patent 11408911 Optomechanical structure with corrugated edge
0
Patent Inventor Names
Kazem Zandi
0
Pierre Pottier
0
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
10126321
Patent Primary Examiner
John Chapman, Jr.
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